Inventor
KITAYAMA HIROFUMI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KITAYAMA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7235137B2Jun 26, 2007
Conductor treating single-wafer type treating device and method for semi-conductor treating
TOKYO ELECTRON LTD752 citations98
US5217501AJun 8, 1993
Vertical wafer heat treatment apparatus having dual load lock chambers
TOKYO ELECTRON LTD149 citations96
US5316472AMay 31, 1994
Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus
TOKYO ELECTRON LTD66 citations93
USD378823SApr 15, 1997
Wafer boat
TOKYO ELECTRON LTD27 citations92
US5445521AAug 29, 1995
Heat treating method and device
TOKYO ELECTRON LTD21 citations92
US6095806AAug 1, 2000
Semiconductor wafer boat and vertical heat treating system
TOKYO ELECTRON LTD40 citations89
US5622639AApr 22, 1997
Heat treating apparatus
TOKYO ELECTRON LTD43 citations88
TEL SAGAMI LTD
5 patentsUS5445486AAug 29, 1995
Substrate transferring apparatus
TEL SAGAMI LTD110 citations97
US5162047ANov 10, 1992
Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers
TEL SAGAMI LTD107 citations96
US5110248AMay 5, 1992
Vertical heat-treatment apparatus having a wafer transfer mechanism
TEL SAGAMI LTD90 citations94
US4989540AFeb 5, 1991
Apparatus for reaction treatment
TEL SAGAMI LTD59 citations94
US5030056AJul 9, 1991
Substrate transfer device
TEL SAGAMI LTD20 citations82