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Inventor
HERZIG BRETT M
US
2 patents
Patents
2 patents
US10796940B2
Oct 6, 2020
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP
5 citations
69
US11581214B2
Feb 14, 2023
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP
2 citations
65