Inventor
ENGELSTAEDTER JAN PETER
DE3 patents
Patents
3 patentsUS10971342B2Apr 6, 2021
Controlling multiple plasma processes
TRUMPF HUETTINGER SP Z O O38 citations87
US11538670B2Dec 27, 2022
Controlling multiple plasma processes
TRUMPF HUETTINGER SP Z O O0 citations45
US11430642B2Aug 30, 2022
Controlling multiple plasma processes
TRUMPF HUETTINGER SP Z O O0 citations44