Inventor

HSIN CHIH-HSING

TW2 patents

Patents

2 patents

US6636312B1Oct 21, 2003

Multi-pitch vernier for checking alignment accuracy

UNITED MICROELECTRONICS CORP13 citations79

US5773082AJun 30, 1998

Method for applying photoresist on wafer

UNITED MICROELECTRONICS CORP10 citations70