Inventor
YEN PO-WEN
TW5 patents
Patents
5 patentsUS5445989AAug 29, 1995
Method of forming device isolation regions
UNITED MICROELECTRONICS CORP61 citations95
US5637186AJun 10, 1997
Method and monitor testsite pattern for measuring critical dimension openings
UNITED MICROELECTRONICS CORP76 citations93
US5580701ADec 3, 1996
Process for elimination of standing wave effect of photoresist
UNITED MICROELECTRONICS CORP36 citations91
US5413963AMay 9, 1995
Method for depositing an insulating interlayer in a semiconductor metallurgy system
UNITED MICROELECTRONICS CORP52 citations88
US5773082AJun 30, 1998
Method for applying photoresist on wafer
UNITED MICROELECTRONICS CORP10 citations70