Inventor

SPENCER MARY J

US3 patents

Patents

3 patents

US6869747B2Mar 22, 2005

Organic polymeric antireflective coatings deposited by chemical vapor deposition

BREWER SCIENCE INC15 citations82

US6900000B2May 31, 2005

Organic polymeric antireflective coatings deposited by chemical vapor deposition

BREWER SCIENCE INC11 citations72

US6936405B2Aug 30, 2005

Organic polymeric antireflective coatings deposited by chemical vapor deposition

BREWER SCIENCE INC5 citations61