Inventor
CHYUN KI-HYUN
KR3 patents
Patents
3 patentsUS7594969B2Sep 29, 2009
Device for controlling dispensing error in photo spinner equipment
SAMSUNG ELECTRONICS CO LTD0 citations48
US5791709AAug 11, 1998
Semiconductor manufacturing apparatus having suctorial means for handling wafers
SAMSUNG ELECTRONICS CO LTD1 citations47
US7693682B2Apr 6, 2010
Method for measuring critical dimensions of a pattern using an overlay measuring apparatus
SAMSUNG ELECTRONICS CO LTD0 citations36