Inventor
YEH HUAN-HSIN
TW2 patents
Patents
2 patentsUS11551955B2Jan 10, 2023
Substrate processing apparatus equipped with substrate scanner
UNITED MICROELECTRONICS CORP2 citations58
US7524595B2Apr 28, 2009
Process for forming anti-reflection coating and method for improving accuracy of overlay measurement and alignment
UNITED MICROELECTRONICS CORP0 citations44