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Inventor
DONOHOE RAYMOND JOHN
DE
2 patents
Patents
2 patents
US7402520B2
Jul 22, 2008
Edge removal of silicon-on-insulator transfer wafer
APPLIED MATERIALS INC
23 citations
89
US7951718B2
May 31, 2011
Edge removal of silicon-on-insulator transfer wafer
APPLIED MATERIALS INC
4 citations
59