Inventor

OKADA TAKAYOSHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “OKADA TAKAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARUZEN PETROCHEM CO LTD

1 patent

US7910282B2Mar 22, 2011

Copolymer for semiconductor lithography and producing method thereof, and composition

MARUZEN PETROCHEM CO LTD3 citations56

YAMAGISHI TAKANORI

1 patent

US8211615B2Jul 3, 2012

Copolymer for immersion lithography and compositions

YAMAGISHI TAKANORI1 citations45

OIKAWA TOMO

1 patent

US8859180B2Oct 14, 2014

Copolymer and composition for semiconductor lithography and process for producing the copolymer

OIKAWA TOMO0 citations34