Inventor
LORIMER D ARCY H
US27 patents
⚠️ This page may combine multiple inventors who share the name “LORIMER D ARCY H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAES PURE GAS INC
14 patentsUS5238469AAug 24, 1993
Method and apparatus for removing residual hydrogen from a purified gas
SAES PURE GAS INC93 citations94
US6068685AMay 30, 2000
Semiconductor manufacturing system with getter safety device
SAES PURE GAS INC33 citations92
US5993165ANov 30, 1999
In Situ getter pump system and method
SAES PURE GAS INC23 citations92
US5895519AApr 20, 1999
Method and apparatus for purifying hydrogen gas
SAES PURE GAS INC32 citations92
US5855118AJan 5, 1999
Combination cryopump/getter pump and method for regenerating same
SAES PURE GAS INC33 citations92
US5685963ANov 11, 1997
In situ getter pump system and method
SAES PURE GAS INC30 citations92
US5334237AAug 2, 1994
Method and apparatus for predicting end-of-life of a consumable in a fluid purification system
SAES PURE GAS INC31 citations92
US5911560AJun 15, 1999
Getter pump module and system
SAES PURE GAS INC21 citations91
USRE35725EFeb 10, 1998
Method and apparatus for removing residual hydrogen from a purified gas
SAES PURE GAS INC17 citations90
US5879134AMar 9, 1999
In situ getter pump system and method
SAES PURE GAS INC11 citations82
US6398846B1Jun 4, 2002
Semiconductor manufacturing system with getter safety device
SAES PURE GAS INC13 citations81
US6232204B1May 15, 2001
Semiconductor manufacturing system with getter safety device
SAES PURE GAS INC11 citations73
US6156105ADec 5, 2000
Semiconductor manufacturing system with getter safety device
SAES PURE GAS INC11 citations73
US6142742ANov 7, 2000
Getter pump module and system
SAES PURE GAS INC15 citations73
GETTERS SPA
6 patentsUS6168645B1Jan 2, 2001
Safety system for gas purifier
GETTERS SPA32 citations92
US5972183AOct 26, 1999
Getter pump module and system
GETTERS SPA30 citations92
US6165328ADec 26, 2000
Method for processing wafers with in situ gettering
GETTERS SPA13 citations82
US5980213ANov 9, 1999
Getter pump module and system
GETTERS SPA12 citations82
US6043137AMar 28, 2000
Getter pump module and system
GETTERS SPA5 citations74
US5997255ADec 7, 1999
Method for pumping a chamber using an in situ getter pump
GETTERS SPA5 citations74
APPLIED MATERIALS INC
4 patentsUS5069938ADec 3, 1991
Method of forming a corrosion-resistant protective coating on aluminum substrate
APPLIED MATERIALS INC157 citations98
US5363872ANov 15, 1994
Low particulate slit valve system and method for controlling same
APPLIED MATERIALS INC100 citations96
US5192610AMar 9, 1993
Corrosion-resistant protective coating on aluminum substrate and method of forming same
APPLIED MATERIALS INC25 citations92
US4837052AJun 6, 1989
Process for forming reflective gold coatings
APPLIED MATERIALS INC10 citations74