Inventor
YUAN BAUSAN
US39 patents
⚠️ This page may combine multiple inventors who share the name “YUAN BAUSAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
31 patentsUS6008610ADec 28, 1999
Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
NIKON CORP79 citations96
US5777403AJul 7, 1998
Voice coil motor with air guide and air bellows
NIKON CORP73 citations96
US6130517AOct 10, 2000
Magnetic actuator producing large acceleration on fine stage and low RMS power gain
NIKON CORP64 citations95
US6069417AMay 30, 2000
Stage having paired E/I core actuator control
NIKON CORP60 citations95
US6260282B1Jul 17, 2001
Stage control with reduced synchronization error and settling time
NIKON CORP84 citations94
US6927505B2Aug 9, 2005
Following stage planar motor
NIKON CORP27 citations93
US6486941B1Nov 26, 2002
Guideless stage
NIKON CORP28 citations93
US6590639B1Jul 8, 2003
Active vibration isolation system having pressure control
NIKON CORP35 citations92
US5940789AAug 17, 1999
Stage control method and apparatus with varying stage controller parameter
NIKON CORP30 citations92
US6472777B1Oct 29, 2002
Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuators
NIKON CORP19 citations91
US6320345B1Nov 20, 2001
Command trajectory for driving a stage with minimal vibration
NIKON CORP41 citations90
US7172493B2Feb 6, 2007
Fine force actuator assembly for chemical mechanical polishing apparatuses
NIKON CORP14 citations84
US7417714B2Aug 26, 2008
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
NIKON CORP10 citations82
US10477128B2Nov 12, 2019
Neighborhood haze density estimation for single-image dehaze
NIKON CORP9 citations80
US7333179B2Feb 19, 2008
Moving mechanism with high bandwidth response and low force transmissibility
NIKON CORP7 citations74
US6987558B2Jan 17, 2006
Reaction mass for a stage device
NIKON CORP8 citations74
US6646719B2Nov 11, 2003
Support assembly for an exposure apparatus
NIKON CORP9 citations74
US6509953B1Jan 21, 2003
Apparatus for exposing a pattern onto an object with controlled scanning
NIKON CORP10 citations74
US6285438B1Sep 4, 2001
Scanning exposure method with reduced time between scans
NIKON CORP12 citations74
US7034474B2Apr 25, 2006
Auto-calibration of attraction-only type actuator commutations
NIKON CORP9 citations71
US11401450B2Aug 2, 2022
Fluid synthesis system
NIKON CORP0 citations62
US7583361B2Sep 1, 2009
System for controlling a dual mover assembly for an exposure apparatus
NIKON CORP3 citations62
US7061577B2Jun 13, 2006
Image adjustor including damping assembly
NIKON CORP6 citations62
US6855032B1Feb 15, 2005
Fine force control of actuators for chemical mechanical polishing apparatuses
NIKON CORP6 citations62
US7989756B2Aug 2, 2011
Active-isolation mounts for optical elements
NIKON CORP3 citations61
US7253576B2Aug 7, 2007
E/I core actuator commutation formula and control method
NIKON CORP3 citations60
US7366642B2Apr 29, 2008
Minimum force output control method for counter-mass with cable
NIKON CORP2 citations58
US6963821B2Nov 8, 2005
Stage counter mass system
NIKON CORP0 citations52
US6287735B2Sep 11, 2001
Method and apparatus for controlling the leveling table of a wafer stage
NIKON CORP0 citations52
US8836252B2Sep 16, 2014
Linearized control of piezoelectric actuator to reduce hysteresis
NIKON CORP1 citations47
US7876452B2Jan 25, 2011
Interferometric position-measuring devices and methods
NIKON CORP0 citations41
YANG PAI-HSUEH
3 patentsUS8140288B2Mar 20, 2012
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
YANG PAI-HSUEH6 citations71
US9465305B2Oct 11, 2016
Method for determining a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH3 citations70
US9013134B2Apr 21, 2015
Method for determing a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH1 citations49