Inventor
SAIKI KAZUAKI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SAIKI KAZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
12 patentsUS6008610ADec 28, 1999
Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
NIKON CORP79 citations96
US5715037AFeb 3, 1998
Scanning exposure apparatus
NIKON CORP59 citations96
US6744511B1Jun 1, 2004
Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage
NIKON CORP28 citations92
US6084244AJul 4, 2000
Scanning exposure apparatus that compensates for positional deviation caused by substrate inclination
NIKON CORP39 citations92
US5920378AJul 6, 1999
Projection exposure apparatus
NIKON CORP42 citations92
US5777722AJul 7, 1998
Scanning exposure apparatus and method
NIKON CORP39 citations92
US5657130AAug 12, 1997
Exposure apparatus and method
NIKON CORP49 citations92
US5640227AJun 17, 1997
Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern
NIKON CORP32 citations92
US6320345B1Nov 20, 2001
Command trajectory for driving a stage with minimal vibration
NIKON CORP41 citations90
US6509953B1Jan 21, 2003
Apparatus for exposing a pattern onto an object with controlled scanning
NIKON CORP10 citations74
US6606146B2Aug 12, 2003
Stage device, exposure apparatus incorporating the stage device, and method of using the same
NIKON CORP10 citations73
US5798822AAug 25, 1998
Exposure apparatus
NIKON CORP14 citations73