Inventor
WISTROM RICHARD E
US4 patents
Patents
4 patentsUS6989105B2Jan 24, 2006
Detection of hardmask removal using a selective etch
IBM2 citations60
US7355680B2Apr 8, 2008
Method for adjusting lithographic mask flatness using thermally induced pellicle stress
IBM2 citations59
US6391661B2May 21, 2002
Semiconductor and method of fabricating
IBM1 citations47
US6229155B1May 8, 2001
Semiconductor and method of fabricating
IBM1 citations47