Inventor
CHOI JUN TAE
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHOI JUN TAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS7390757B2Jun 24, 2008
Methods for improving low k FSG film gap-fill characteristics
APPLIED MATERIALS INC4 citations51
US10858735B2Dec 8, 2020
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46
US10435786B2Oct 8, 2019
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46
US12020907B2Jun 25, 2024
Faceplate with localized flow control
APPLIED MATERIALS INC0 citations41