Inventor
PURDY MATTHEW A
US30 patents
⚠️ This page may combine multiple inventors who share the name “PURDY MATTHEW A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
26 patentsUS6988045B2Jan 17, 2006
Dynamic metrology sampling methods, and system for performing same
ADVANCED MICRO DEVICES INC63 citations98
US6708129B1Mar 16, 2004
Method and apparatus for wafer-to-wafer control with partial measurement data
ADVANCED MICRO DEVICES INC69 citations96
US7153709B1Dec 26, 2006
Method and apparatus for calibrating degradable components using process state data
ADVANCED MICRO DEVICES INC24 citations92
US7100081B1Aug 29, 2006
Method and apparatus for fault classification based on residual vectors
ADVANCED MICRO DEVICES INC26 citations92
US7067333B1Jun 27, 2006
Method and apparatus for implementing competing control models
ADVANCED MICRO DEVICES INC50 citations92
US6978189B1Dec 20, 2005
Matching data related to multiple metrology tools
ADVANCED MICRO DEVICES INC21 citations92
US6639663B1Oct 28, 2003
Method and apparatus for detecting processing faults using scatterometry measurements
ADVANCED MICRO DEVICES INC28 citations92
US6740534B1May 25, 2004
Determination of a process flow based upon fault detection analysis
ADVANCED MICRO DEVICES INC34 citations91
US6728591B1Apr 27, 2004
Method and apparatus for run-to-run control of trench profiles
ADVANCED MICRO DEVICES INC37 citations91
US6790686B1Sep 14, 2004
Method and apparatus for integrating dispatch and process control actions
ADVANCED MICRO DEVICES INC31 citations90
US7076321B2Jul 11, 2006
Method and system for dynamically adjusting metrology sampling based upon available metrology capacity
ADVANCED MICRO DEVICES INC11 citations84
US6912436B1Jun 28, 2005
Prioritizing an application of correction in a multi-input control system
ADVANCED MICRO DEVICES INC12 citations84
US7460968B1Dec 2, 2008
Method and apparatus for selecting wafers for sampling
ADVANCED MICRO DEVICES INC15 citations83
US6991945B1Jan 31, 2006
Fault detection spanning multiple processes
ADVANCED MICRO DEVICES INC11 citations83
US7296103B1Nov 13, 2007
Method and system for dynamically selecting wafer lots for metrology processing
ADVANCED MICRO DEVICES INC18 citations82
US6988225B1Jan 17, 2006
Verifying a fault detection result based on a process control state
ADVANCED MICRO DEVICES INC8 citations74
US6562635B1May 13, 2003
Method of controlling metal etch processes, and system for accomplishing same
ADVANCED MICRO DEVICES INC10 citations74
US7849366B1Dec 7, 2010
Method and apparatus for predicting yield parameters based on fault classification
ADVANCED MICRO DEVICES INC5 citations63
US7715941B1May 11, 2010
Method and apparatus for scheduling a plurality of processing tools
ADVANCED MICRO DEVICES INC2 citations63
US7069103B1Jun 27, 2006
Controlling cumulative wafer effects
ADVANCED MICRO DEVICES INC4 citations63
US7473566B1Jan 6, 2009
Method and apparatus for controlling a film formation process with multiple objectives
ADVANCED MICRO DEVICES INC2 citations62
US6967068B1Nov 22, 2005
Method of controlling stepper process parameters based upon optical properties of incoming anti-reflecting coating layers, and system for accomplishing same
ADVANCED MICRO DEVICES INC2 citations61
US7299106B1Nov 20, 2007
Method and apparatus for scheduling metrology based on a jeopardy count
ADVANCED MICRO DEVICES INC2 citations60
US7069098B2Jun 27, 2006
Method and system for prioritizing material to clear exception conditions
ADVANCED MICRO DEVICES INC0 citations52
US7026170B1Apr 11, 2006
Methods of controlling optical properties of a capping insulating layer on memory devices, and system for performing same
ADVANCED MICRO DEVICES INC1 citations52
US6790752B1Sep 14, 2004
Methods of controlling VSS implants on memory devices, and system for performing same
ADVANCED MICRO DEVICES INC0 citations52