Inventor

HASEGAWA ETSUO

JP74 patents

⚠️ This page may combine multiple inventors who share the name “HASEGAWA ETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HASEGAWA ETSUO

NEC CORP

Photosensitive resin and method for patterning by use of the same

Photoresist, compounds for composing the photoresist, and method of forming pattern by using the photoresist

(Meth)acrylate derivative, polymer and photoresist composition having lactone structure, and method for forming pattern by using it

(Meth) acrylate derivative, polymer and photoresist composition having lactone structure, and method for forming pattern by using it

Photosensitive resin and method for patterning by use of the same

Photosensitive resin composition useful as resist for deep UV lithography containing sulfonium salts

Alkylsulfonium salts and photoresist compositions containing the same

Sulfonium salt compound, photoresist composition and method for patterning by employing same

Monomer having diol structure, polymer thereof, and negative photoresist composition and pattern forming method using the same

Photosensitive resin composition and patterning method using the same

Negative photoresist composition using polymer having 1,2-diol structure and process for forming pattern using the same

Negative type photoresist composition used for light beam with short wavelength and method of forming pattern using the same

Negative resist materials, pattern formation method making use thereof, and method of manufacturing semiconductor devices

Negative type photoresist composition used for light beam with short wavelength and method of forming pattern using the same

Chemically amplified resist large in transparency and sensitivity to exposure light less than 248 nanometer wavelength and process of forming mask

Sulfonium salts having bridged cyclic alkyl group useful as resist for deep UV lithography

Polymer having silicon atoms and sulfonium salt units and photoresist compositions containing the same

Monomer having vinyl group, polymer thereof and photosensitive resin including those

Alkylsulfonium salts and photoresist compositions containing the same

Secondary battery

Method for production of battery

High molecular gel electrolyte and secondary battery using the same

Photoresist and compounds for composing the photoresist

Photoresist and monomer and polymer for composing the photoresist

Solid electrolyte capacitor using polyaniline doped with disulfonic acid

Liquid crystalline optical device operable at a low drive voltage

Secondary battery with a radical compound active material

Photoacid generator containing two kinds of sulfonium salt compound, chemically amplified resist containing the same and pattern transfer method

Organic electroluminescent device with buried lower elecrodes and method for manufacturing the same

Sulfonium salt compound and resist composition and pattern forming method using the same

(Meth)acrylate, polymer, photoresist composition, and pattern forming process making use of the composition

Negative photoresist composition using polymer having 1,2-diol structure and process for forming pattern using the same

(Meth)acrylate, polymer photoresist composition, and pattern forming process making use of the composition

Chemically amplified resist large in transparency and sensitivity to exposure light less than 248 nanometer wavelength and process of forming mask

(Meth)acrylate, polymer, photoresist composition, and pattern forming process making use of the composition

Photolytic polymer and photoresist composition

Organic electroluminescent device

DENSO CORP

Heat exchanger for exchanging heat between internal fluid and external fluid and manufacturing method thereof

Heat exchanger

Heat exchanger

Heat exchange tube having multiple fluid paths

Heat exchanger

Heat exchanger

Refrigerant evaporator

Heat exchanger

Heat exchanger

NIPPON DENSO CO

Evaporator for cooling units

Cooling unit and drain case for air conditioners

YAMADA ATSUSHI

Cold-storage heat exchanger

NIPPON OILS & FATS CO LTD

Macromolecular endoplasmic reticulum