Inventor
LANGAN JOHN GILES
US8 patents
⚠️ This page may combine multiple inventors who share the name “LANGAN JOHN GILES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
6 patentsUS6686594B2Feb 3, 2004
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
AIR PROD & CHEM53 citations94
US6637998B2Oct 28, 2003
Self evacuating micro environment system
AIR PROD & CHEM42 citations92
US7013916B1Mar 21, 2006
Sub-atmospheric gas delivery method and apparatus
AIR PROD & CHEM44 citations91
US6023933AFeb 15, 2000
Ultra high pressure gases
AIR PROD & CHEM28 citations91
US5910294AJun 8, 1999
Abatement of NF3 with metal oxalates
AIR PROD & CHEM10 citations72
US6837250B2Jan 4, 2005
CVD chamber cleaning using mixed PFCs from capture/recycle
AIR PROD & CHEM2 citations62