Inventor

SHAHVANDI IRAJ ERIC

US2 patents

Patents

2 patents

US6786222B2Sep 7, 2004

Method for removing particles from a semiconductor processing tool

MOTOROLA INC9 citations63

US6362098B1Mar 26, 2002

Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate

MOTOROLA INC2 citations52