Inventor
HSIUNG THOMAS HSIAO-LING
US16 patents
⚠️ This page may combine multiple inventors who share the name “HSIUNG THOMAS HSIAO-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
15 patentsUS5976222ANov 2, 1999
Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
AIR PROD & CHEM56 citations94
US6637998B2Oct 28, 2003
Self evacuating micro environment system
AIR PROD & CHEM42 citations92
US6572681B1Jun 3, 2003
Purification of gases
AIR PROD & CHEM37 citations92
US6514471B1Feb 4, 2003
Removing fluorine from semiconductor processing exhaust gas
AIR PROD & CHEM25 citations92
US6093379AJul 25, 2000
Purification of gases
AIR PROD & CHEM47 citations92
US5706674AJan 13, 1998
Argon recovery from silicon crystal furnace
AIR PROD & CHEM28 citations92
US5730779AMar 24, 1998
Fluorochemical recovery and recycle using membranes
AIR PROD & CHEM47 citations90
US6074621AJun 13, 2000
Purification of gases
AIR PROD & CHEM13 citations74
US5958356ASep 28, 1999
Method for removal of moisture from gaseous HCl
AIR PROD & CHEM16 citations74
US6352676B1Mar 5, 2002
Abatement of F2 using small particle fluidized bed
AIR PROD & CHEM11 citations73
US6106790AAug 22, 2000
Abatement of NF3 using small particle fluidized bed
AIR PROD & CHEM8 citations73
US6032484AMar 7, 2000
Recovery of perfluorinated compounds from the exhaust of semiconductor fabs with recycle of vacuum pump diluent
AIR PROD & CHEM11 citations71
US5737941AApr 14, 1998
Method and apparatus for removing trace quantities of impurities from liquified bulk gases
AIR PROD & CHEM11 citations68
US5993760ANov 30, 1999
Bulk nitrogen purification process that requires no hydrogen in the regeneration
AIR PROD & CHEM3 citations57
US5863852AJan 26, 1999
Regeneration of adsorbent beds
AIR PROD & CHEM4 citations57