Inventor

KURITA HISATSUGU

JP3 patents

Patents

3 patents

US7247583B2Jul 24, 2007

Manufacturing method for strained silicon wafer

TOSHIBA CERAMICS CO3 citations60

US7060597B2Jun 13, 2006

Manufacturing method for a silicon substrate having strained layer

TOSHIBA CERAMICS CO5 citations60

US7226513B2Jun 5, 2007

Silicon wafer cleaning method

TOSHIBA CERAMICS CO0 citations42