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Inventor
WATERHOUSE BARBARA
US
2 patents
Patents
2 patents
US7301752B2
Nov 27, 2007
Formation of metal-insulator-metal capacitor simultaneously with aluminum metal wiring level using a hardmask
IBM
10 citations
82
US7511940B2
Mar 31, 2009
Formation of metal-insulator-metal capacitor simultaneously with aluminum metal wiring level using a hardmask
IBM
0 citations
50