Inventor

ZHUGE JING

CN2 patents

Patents

2 patents

US8513067B2Aug 20, 2013

Fabrication method for surrounding gate silicon nanowire transistor with air as spacers

HUANG RU10 citations81

US8563370B2Oct 22, 2013

Method for fabricating surrounding-gate silicon nanowire transistor with air sidewalls

HUANG RU3 citations60