Inventor
REINHARDT HEINZ F
US17 patents
⚠️ This page may combine multiple inventors who share the name “REINHARDT HEINZ F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RODEL INC
14 patentsUS6017265AJan 25, 2000
Methods for using polishing pads
RODEL INC186 citations98
US6069080AMay 30, 2000
Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
RODEL INC126 citations97
US5900164AMay 4, 1999
Method for planarizing a semiconductor device surface with polymeric pad containing hollow polymeric microelements
RODEL INC141 citations97
US5578362ANov 26, 1996
Polymeric polishing pad containing hollow polymeric microelements
RODEL INC433 citations97
US6095902AAug 1, 2000
Polyether-polyester polyurethane polishing pads and related methods
RODEL INC86 citations96
US6019666AFeb 1, 2000
Mosaic polishing pads and methods relating thereto
RODEL INC69 citations96
US6439989B1Aug 27, 2002
Polymeric polishing pad having continuously regenerated work surface
RODEL INC39 citations95
US6231434B1May 15, 2001
Polishing pads and methods relating thereto
RODEL INC44 citations95
US6099954AAug 8, 2000
Polishing material and method of polishing a surface
RODEL INC72 citations93
US6337281B1Jan 8, 2002
Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
RODEL INC44 citations92
US6325703B2Dec 4, 2001
Polishing pads and methods relating thereto
RODEL INC23 citations92
US6106754AAug 22, 2000
Method of making polishing pads
RODEL INC35 citations92
US6454633B1Sep 24, 2002
Polishing pads of flocked hollow fibers and methods relating thereto
RODEL INC31 citations89
US6419556B1Jul 16, 2002
Method of polishing using a polishing pad
RODEL INC33 citations89
ROHM & HAAS ELECT MAT
3 patentsUS6899611B2May 31, 2005
Polishing pad for a semiconductor device having a dissolvable substance
ROHM & HAAS ELECT MAT32 citations95
US6903021B2Jun 7, 2005
Method of polishing a semiconductor device
ROHM & HAAS ELECT MAT6 citations72
US7270762B2Sep 18, 2007
Polishing compositions for noble metals
ROHM & HAAS ELECT MAT2 citations61