Inventor
SUNG HONG-CHENG
TW2 patents
Patents
2 patentsUS6093607AJul 25, 2000
Method of forming sharp beak of poly by oxygen/fluorine implant to improve erase speed for split-gate flash
TAIWAN SEMICONDUCTOR MFG22 citations91
US6667509B1Dec 23, 2003
Method of forming sharp beak of poly by oxygen/fluorine implant to improve erase speed for split-gate flash
TAIWAN SEMICONDUCTOR MFG7 citations72