P

Inventor

VOGTMANN MICHAEL R

US11 patents
⚠️ This page may combine multiple inventors who share the name “VOGTMANN MICHAEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents
US6267642B1Jul 31, 2001

Sensing the presence of a wafer

LAM RES CORP21 citations91
US6405740B1Jun 18, 2002

Accurate positioning of a wafer

LAM RES CORP11 citations81
US6283827B1Sep 4, 2001

Non-contacting support for a wafer

LAM RES CORP9 citations81
US6796881B1Sep 28, 2004

Sensing the presence of a wafer

LAM RES CORP6 citations72
US6505635B1Jan 14, 2003

Lifting and rinsing a wafer

LAM RES CORP9 citations72

STRASBAUGH

3 patents
US6102057AAug 15, 2000

Lifting and rinsing a wafer

STRASBAUGH25 citations91
US8968052B2Mar 3, 2015

Systems and methods of wafer grinding

STRASBAUGH6 citations72
US9393669B2Jul 19, 2016

Systems and methods of processing substrates

STRASBAUGH5 citations68

STRASBAUGH INC

1 patent
US6131589AOct 17, 2000

Accurate positioning of a wafer

STRASBAUGH INC36 citations94

WAFER SOLUTIONS INC

1 patent
US6632012B2Oct 14, 2003

Mixing manifold for multiple inlet chemistry fluids

WAFER SOLUTIONS INC7 citations71

SCHRAUB FREDERIC ANTHONY

1 patent
US8520222B2Aug 27, 2013

System and method for in situ monitoring of top wafer thickness in a stack of wafers

SCHRAUB FREDERIC ANTHONY4 citations48