Inventor · disambiguated record

Tou-Yu Chen

Also filed as: CHEN TOU-YU

1 granted patent·7 citations·filing 2002–2002

29Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0150US6852472B2Polysilicon hard mask etch defect particle removalTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 8, 2005·7 cites·20 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →