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Inventor
KOO KYEONGMO
KR
2 patents
Patents
2 patents
US7169704B2
Jan 30, 2007
Method of cleaning a surface of a water in connection with forming a barrier layer of a semiconductor device
SAMSUNG ELECTRONICS CO LTD
12 citations
76
US7452810B2
Nov 18, 2008
Method of forming a barrier layer of a semiconductor device
SAMSUNG ELECTRONICS CO LTD
2 citations
54