P

Inventor

YANAGITA KAZUTAKA

JP59 patents
⚠️ This page may combine multiple inventors who share the name “YANAGITA KAZUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

39 patents
US6624047B1Sep 23, 2003

Substrate and method of manufacturing the same

CANON KK150 citations99
US6426270B1Jul 30, 2002

Substrate processing method and method of manufacturing semiconductor substrate

CANON KK82 citations98
US6391743B1May 21, 2002

Method and apparatus for producing photoelectric conversion device

CANON KK88 citations98
US6382292B1May 7, 2002

Method and apparatus for separating composite member using fluid

CANON KK97 citations98
US6342433B1Jan 29, 2002

Composite member its separation method and preparation method of semiconductor substrate by utilization thereof

CANON KK96 citations98
US6376332B1Apr 23, 2002

Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method

CANON KK93 citations97
US6946052B2Sep 20, 2005

Separating apparatus and processing method for plate member

CANON KK59 citations96
US6605518B1Aug 12, 2003

Method of separating composite member and process for producing thin film

CANON KK63 citations96
US6418999B1Jul 16, 2002

Sample separating apparatus and method, and substrate manufacturing method

CANON KK55 citations96
US6746559B2Jun 8, 2004

Method and apparatus for separating composite member using fluid

CANON KK33 citations93
US6672358B2Jan 6, 2004

Sample processing system

CANON KK33 citations93
US6653205B2Nov 25, 2003

Composite member separating method, thin film manufacturing method, and composite member separating apparatus

CANON KK35 citations93
US6629539B1Oct 7, 2003

Sample processing system

CANON KK25 citations93
US6597039B2Jul 22, 2003

Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof

CANON KK35 citations93
US6527031B1Mar 4, 2003

Sample separating apparatus and method, and substrate manufacturing method

CANON KK31 citations93
US6475323B1Nov 5, 2002

Method and apparatus for separating composite member using fluid

CANON KK33 citations93
US6380099B2Apr 30, 2002

Porous region removing method and semiconductor substrate manufacturing method

CANON KK30 citations93
US6979629B2Dec 27, 2005

Method and apparatus for processing composite member

CANON KK18 citations92
US6900114B2May 31, 2005

Separating apparatus, separating method, and method of manufacturing semiconductor substrate

CANON KK20 citations92
US6825099B2Nov 30, 2004

Method and apparatus for separating member

CANON KK30 citations92
US6653206B2Nov 25, 2003

Method and apparatus for processing composite member

CANON KK21 citations92
US6436226B1Aug 20, 2002

Object separating apparatus and method, and method of manufacturing semiconductor substrate

CANON KK31 citations92
US6427747B1Aug 6, 2002

Apparatus and method of separating sample and substrate fabrication method

CANON KK19 citations92
US6427748B1Aug 6, 2002

Sample processing apparatus and method

CANON KK20 citations92
US6767840B1Jul 27, 2004

Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method

CANON KK36 citations90
US6199563B1Mar 13, 2001

Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method

CANON KK39 citations90
US6833312B2Dec 21, 2004

Plate member separating apparatus and method

CANON KK14 citations84
US6127281AOct 3, 2000

Porous region removing method and semiconductor substrate manufacturing method

CANON KK18 citations84
US7017830B2Mar 28, 2006

Method and apparatus for separating sample

CANON KK8 citations74
US6971432B2Dec 6, 2005

Sample processing system

CANON KK5 citations74
US6712288B2Mar 30, 2004

Method and apparatus for separating sample

CANON KK8 citations74
US6391067B2May 21, 2002

Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus

CANON KK10 citations74
US6867110B2Mar 15, 2005

Separating apparatus and processing method for plate member

CANON KK9 citations73
US6852187B2Feb 8, 2005

Method and apparatus for separating member

CANON KK8 citations73
US6609446B1Aug 26, 2003

Separating apparatus, separating method, and method of manufacturing semiconductor substrate

CANON KK9 citations73
US6609553B2Aug 26, 2003

Sample processing apparatus and method

CANON KK4 citations73
US6521078B2Feb 18, 2003

Sample separating apparatus and method, and substrate manufacturing method

CANON KK8 citations73
US6946046B2Sep 20, 2005

Method and apparatus for separating member

CANON KK3 citations62
US6860963B2Mar 1, 2005

Sample separating apparatus and method, and substrate manufacturing method

CANON KK3 citations62

HITACHI INT ELECTRIC INC

3 patents
US9548198B2Jan 17, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations72
US9343290B2May 17, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC6 citations72
US8815751B2Aug 26, 2014

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC4 citations70

AIR LIQUIDE

2 patents
US7544389B2Jun 9, 2009

Precursor for film formation and method for forming ruthenium-containing film

AIR LIQUIDE8 citations84
US7351670B2Apr 1, 2008

Method for producing silicon nitride films and process for fabricating semiconductor devices using said method

AIR LIQUIDE3 citations62

DUSSARRAT CHRISTIAN

1 patent
US8227032B2Jul 24, 2012

Method of forming silicon oxide containing films

DUSSARRAT CHRISTIAN472 citations98

L AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE

1 patent
US9109281B2Aug 18, 2015

Metal heterocyclic compounds for deposition of thin films

L AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE6 citations83

GATINEAU JULIEN

1 patent
US8636845B2Jan 28, 2014

Metal heterocyclic compounds for deposition of thin films

GATINEAU JULIEN6 citations82

OKUBO SHINGO

1 patent
US8101237B2Jan 24, 2012

Tellurium precursors for film deposition

OKUBO SHINGO7 citations81

CANON KABUHSIKI KAISHA

1 patent
US7579257B2Aug 25, 2009

Sample separating apparatus and method, and substrate manufacturing method

CANON KABUHSIKI KAISHA6 citations74

L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

1 patent
US9633838B2Apr 25, 2017

Vapor deposition of silicon-containing films using penta-substituted disilanes

L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude4 citations70

Showing the top 50 of 59 patents by PatentIndex Score.