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Inventor
SEITA HISAHARU
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “SEITA HISAHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR LEADING EDGE TEC
2 patents
US6808352B2
Oct 26, 2004
Method for transporting boards, load port apparatus, and board transport system
SEMICONDUCTOR LEADING EDGE TEC
78 citations
93
US6943899B2
Sep 13, 2005
Substrate-container measuring device, and substrate-container measuring jig
SEMICONDUCTOR LEADING EDGE TEC
0 citations
48
SONY CORP
2 patents
US6192603B1
Feb 27, 2001
Vacuum processing apparatus and magnetic seal rotary bearing unit
SONY CORP
35 citations
89
US5527718A
Jun 18, 1996
Process for removing impurities from polycide electrode and insulating film using heat
SONY CORP
40 citations
89