Inventor

HATADA HITOSHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “HATADA HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

2 patents

US6811953B2Nov 2, 2004

Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice

NIKON CORP456 citations97

US12498553B2Dec 16, 2025

Microscope objective lens, microscope optical system, and microscope device

NIKON CORP0 citations44

KUMAZAWA MASATO

1 patent

US8130364B2Mar 6, 2012

Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method

KUMAZAWA MASATO0 citations33

HATADA HITOSHI

1 patent

US8427628B2Apr 23, 2013

Exposure apparatus, exposure method and device fabricating method

HATADA HITOSHI0 citations29