Inventor
KOYAMA MOTOO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KOYAMA MOTOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
10 patentsUS6811953B2Nov 2, 2004
Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice
NIKON CORP456 citations97
US6489624B1Dec 3, 2002
Apparatus and methods for detecting thickness of a patterned layer
NIKON CORP115 citations97
US5793473AAug 11, 1998
Projection optical apparatus for projecting a mask pattern onto the surface of a target projection object and projection exposure apparatus using the same
NIKON CORP68 citations96
US6102775AAug 15, 2000
Film inspection method
NIKON CORP59 citations95
US6339219B1Jan 15, 2002
Radiation imaging device and radiation detector
NIKON CORP37 citations92
US5949503ASep 7, 1999
Reflective liquid crystal spatial light modulator and projection apparatus comprising same
NIKON CORP19 citations82
US5909307AJun 1, 1999
Optical system for infrared camera
NIKON CORP12 citations73
US5839808ANov 24, 1998
Projection optical system
NIKON CORP9 citations70
US6750951B2Jun 15, 2004
Optical apparatus, exposure apparatus, and exposure method
NIKON CORP2 citations56
US7573019B2Aug 11, 2009
Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method
NIKON CORP0 citations41
SHIRASU HIROSHI
2 patentsUS8704431B2Apr 22, 2014
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
SHIRASU HIROSHI1 citations48
US8531093B2Sep 10, 2013
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
SHIRASU HIROSHI1 citations48