Inventor
SHIRASU HIROSHI
JP46 patents
⚠️ This page may combine multiple inventors who share the name “SHIRASU HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
31 patentsUS6795169B2Sep 21, 2004
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
NIKON CORP481 citations99
US5729331AMar 17, 1998
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
NIKON CORP134 citations99
US6811953B2Nov 2, 2004
Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice
NIKON CORP456 citations97
US6556278B1Apr 29, 2003
Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted
NIKON CORP26 citations96
US6266131B1Jul 24, 2001
Exposure apparatus
NIKON CORP60 citations96
US5715037AFeb 3, 1998
Scanning exposure apparatus
NIKON CORP59 citations96
US5581075ADec 3, 1996
Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area
NIKON CORP64 citations96
US6351305B1Feb 26, 2002
Exposure apparatus and exposure method for transferring pattern onto a substrate
NIKON CORP26 citations95
US4939630AJul 3, 1990
Illumination optical apparatus
NIKON CORP115 citations95
US5923409AJul 13, 1999
Scanning-type exposure apparatus including a vertically disposed holder surface and method thereof
NIKON CORP17 citations93
US5920378AJul 6, 1999
Projection exposure apparatus
NIKON CORP42 citations92
US5774240AJun 30, 1998
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques
NIKON CORP29 citations92
US5760881AJun 2, 1998
Exposure apparatus with light shielding portion for plotosensitive elements
NIKON CORP42 citations92
US5657130AAug 12, 1997
Exposure apparatus and method
NIKON CORP49 citations92
US5617181AApr 1, 1997
Exposure apparatus and exposure method
NIKON CORP46 citations92
US5528390AJun 18, 1996
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques
NIKON CORP22 citations92
US5504596AApr 2, 1996
Exposure method and apparatus using holographic techniques
NIKON CORP29 citations92
US9539800B2Jan 10, 2017
Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate
NIKON CORP9 citations82
US7372544B2May 13, 2008
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
NIKON CORP8 citations82
US4880308ANov 14, 1989
Aligning apparatus
NIKON CORP21 citations82
US7372543B2May 13, 2008
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
NIKON CORP7 citations74
US7023527B2Apr 4, 2006
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
NIKON CORP7 citations74
US6570641B2May 27, 2003
Projection exposure apparatus
NIKON CORP6 citations74
US6049372AApr 11, 2000
Exposure apparatus
NIKON CORP10 citations74
US5686997ANov 11, 1997
Scanning projection exposure method and projection exposure apparatus
NIKON CORP16 citations74
US5523574AJun 4, 1996
Exposure apparatus
NIKON CORP10 citations74
US5798822AAug 25, 1998
Exposure apparatus
NIKON CORP14 citations73
US6317196B1Nov 13, 2001
Projection exposure apparatus
NIKON CORP3 citations58
US11791223B2Oct 17, 2023
Substrate bonding apparatus and substrate bonding method
NIKON CORP1 citations56
US10627725B2Apr 21, 2020
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method
NIKON CORP0 citations52
US10228625B2Mar 12, 2019
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method
NIKON CORP0 citations52
NIPPON KOGAKU KK
11 patentsUS4769523ASep 6, 1988
Laser processing apparatus
NIPPON KOGAKU KK153 citations96
US4710604ADec 1, 1987
Machining apparatus with laser beam
NIPPON KOGAKU KK53 citations89
US4340819AJul 20, 1982
Photoelectric element array with automatic control of the charge storage time
NIPPON KOGAKU KK21 citations82
US4264810AApr 28, 1981
Focus detecting apparatus
NIPPON KOGAKU KK22 citations82
US4336450AJun 22, 1982
Focus detecting apparatus
NIPPON KOGAKU KK14 citations74
US4319238AMar 9, 1982
Camera display device
NIPPON KOGAKU KK11 citations74
US4297571AOct 27, 1981
Focus detecting device
NIPPON KOGAKU KK18 citations74
US4291224ASep 22, 1981
Light image space frequency component extracting device
NIPPON KOGAKU KK8 citations74
US4368383AJan 11, 1983
System for focus detection utilizing a photoelectric sensor array
NIPPON KOGAKU KK4 citations63
US4339665AJul 13, 1982
Apparatus for detecting displacement of optical image
NIPPON KOGAKU KK3 citations63
US4306143ADec 15, 1981
Device for extracting a plurality of space frequency components
NIPPON KOGAKU KK6 citations63
AOKI YASUO
2 patentsUS8699001B2Apr 15, 2014
Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method
AOKI YASUO2 citations61
US9366974B2Jun 14, 2016
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method
AOKI YASUO0 citations51
SHIRASU HIROSHI
2 patentsUS8704431B2Apr 22, 2014
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
SHIRASU HIROSHI1 citations48
US8531093B2Sep 10, 2013
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
SHIRASU HIROSHI1 citations48