Inventor

WEIBEL EDMUND

CH3 patents

Patents

3 patents

US4422002ADec 20, 1983

Piezo-electric travelling support

IBM44 citations89

US4539089ASep 3, 1985

Method for depositing material with nanometer dimensions

IBM25 citations79

US4605194AAug 12, 1986

High-performance vibration filter

IBM13 citations72