Inventor
IWASAKI MASAYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “IWASAKI MASAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
4 patentsUS6961113B1Nov 1, 2005
Exposure method and apparatus
NIKON CORP29 citations92
US5671054ASep 23, 1997
Method and apparatus for measuring position of pattern formed on a substrate having a thickness
NIKON CORP21 citations90
US6621556B2Sep 16, 2003
Projection exposure apparatus and manufacturing and adjusting methods thereof
NIKON CORP15 citations83
US7397534B2Jul 8, 2008
Exposure apparatus and device manufacturing method
NIKON CORP4 citations61