Inventor
TOWLE STEVEN N
US9 patents
Patents
9 patentsUS6762435B2Jul 13, 2004
Semiconductor device with boron containing carbon doped silicon oxide layer
INTEL CORP229 citations97
US6792179B2Sep 14, 2004
Optical thumbtack
INTEL CORP35 citations92
US6806168B2Oct 19, 2004
Healing of micro-cracks in an on-chip dielectric
INTEL CORP34 citations91
US6610362B1Aug 26, 2003
Method of forming a carbon doped oxide layer on a substrate
INTEL CORP39 citations91
US6436822B1Aug 20, 2002
Method for making a carbon doped oxide dielectric material
INTEL CORP39 citations91
US6518171B1Feb 11, 2003
Dual damascene process using a low k interlayer for forming vias and trenches
INTEL CORP13 citations83
US7589417B2Sep 15, 2009
Microelectronic assembly having thermoelectric elements to cool a die and a method of making the same
INTEL CORP8 citations80
US6975017B2Dec 13, 2005
Healing of micro-cracks in an on-chip dielectric
INTEL CORP10 citations72
US6770575B2Aug 3, 2004
Method for improving thermal stability of fluorinated amorphous carbon low dielectric constant materials
INTEL CORP3 citations61