Inventor
BJORNARD ERIK J
US20 patents
⚠️ This page may combine multiple inventors who share the name “BJORNARD ERIK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VIRATEC THIN FILMS INC
14 patentsUS5579162ANov 26, 1996
Antireflection coating for a temperature sensitive substrate
VIRATEC THIN FILMS INC137 citations98
US5725746AMar 10, 1998
Shielding for arc suppression in rotating magnetron sputtering systems
VIRATEC THIN FILMS INC76 citations96
US5470452ANov 28, 1995
Shielding for arc suppression in rotating magnetron sputtering systems
VIRATEC THIN FILMS INC64 citations96
US5450238ASep 12, 1995
Four-layer antireflection coating for deposition in in-like DC sputtering apparatus
VIRATEC THIN FILMS INC68 citations95
US5200049AApr 6, 1993
Cantilever mount for rotating cylindrical magnetrons
VIRATEC THIN FILMS INC94 citations94
US5407733AApr 18, 1995
Electrically-conductive, light-attenuating antireflection coating
VIRATEC THIN FILMS INC68 citations93
US5106474AApr 21, 1992
Anode structures for magnetron sputtering apparatus
VIRATEC THIN FILMS INC62 citations93
US5100527AMar 31, 1992
Rotating magnetron incorporating a removable cathode
VIRATEC THIN FILMS INC86 citations92
US5688389ANov 18, 1997
Method and apparatus for thin film coating an article
VIRATEC THIN FILMS INC20 citations91
US5651723AJul 29, 1997
Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings
VIRATEC THIN FILMS INC88 citations91
US5620572AApr 15, 1997
Method and apparatus for thin film coating an article
VIRATEC THIN FILMS INC20 citations91
US5489369AFeb 6, 1996
Method and apparatus for thin film coating an article
VIRATEC THIN FILMS INC27 citations91
US5772861AJun 30, 1998
System for evaluating thin film coatings
VIRATEC THIN FILMS INC26 citations88
US5156727AOct 20, 1992
Film thickness uniformity control apparatus for in-line sputtering systems
VIRATEC THIN FILMS INC23 citations88