Inventor
HERMANSON ERIC
US17 patents
⚠️ This page may combine multiple inventors who share the name “HERMANSON ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
10 patentsUS7394073B2Jul 1, 2008
Methods and apparatus for ion beam angle measurement in two dimensions
VARIAN SEMICONDUCTOR EQUIPMENT25 citations89
US7250617B2Jul 31, 2007
Ion beam neutral detection
VARIAN SEMICONDUCTOR EQUIPMENT7 citations73
US7402816B2Jul 22, 2008
Electron injection in ion implanter magnets
VARIAN SEMICONDUCTOR EQUIPMENT7 citations71
US7863520B2Jan 4, 2011
Interfacing two insulation parts in high voltage environment
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US7170067B2Jan 30, 2007
Ion beam measurement apparatus and method
VARIAN SEMICONDUCTOR EQUIPMENT3 citations60
US7576337B2Aug 18, 2009
Power supply for an ion implantation system
VARIAN SEMICONDUCTOR EQUIPMENT3 citations59
US7842934B2Nov 30, 2010
Terminal structures of an ion implanter having insulated conductors with dielectric fins
VARIAN SEMICONDUCTOR EQUIPMENT4 citations57
US7799999B2Sep 21, 2010
Insulated conducting device with multiple insulation segments
VARIAN SEMICONDUCTOR EQUIPMENT0 citations50
US7863531B2Jan 4, 2011
Techniques for making high voltage connections
VARIAN SEMICONDUCTOR EQUIPMENT0 citations48
US8698108B1Apr 15, 2014
Ion beam measurement system and method
VARIAN SEMICONDUCTOR EQUIPMENT1 citations46
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS10410844B2Sep 10, 2019
RF clean system for electrostatic elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US9613778B1Apr 4, 2017
Connector for process chamber electrostatic elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations68
US10157763B2Dec 18, 2018
High throughput substrate handling endstation and sequence
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51
US10867772B2Dec 15, 2020
Electrostatic element having grooved exterior surface
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations46