Inventor

SCHUURMANS FRANK JEROEN PIETER

NL37 patents

⚠️ This page may combine multiple inventors who share the name “SCHUURMANS FRANK JEROEN PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHUURMANS FRANK JEROEN PIETER

ASML NETHERLANDS BV

Lithographic projection apparatus and particle barrier for use therein

Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby

Contamination barrier with expandable lamellas

Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method

Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus and reflector assembly for use therein

Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap

Lithographic projection apparatus with multiple suppression meshes

Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus

Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system

Method for the protection of an optical element, lithographic apparatus, and device manufacturing method

Lithographic apparatus, illumination system and method for mitigating debris particles

Contamination barrier with expandable lamellas

Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby

Lithographic projection apparatus and reflector assembly for use therein

Lithographic projection apparatus and reflector assembly for use therein

Lithographic apparatus, device manufacturing method and radiation system

Lithographic projection apparatus and device manufacturing method

Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Device manufacturing method, lithographic apparatus and device manufactured thereby

Lithographic apparatus, device manufacturing method and radiation system

LUECKEN UWE

Detector system for use with transmission electron microscope spectroscopy

Detector system for transmission electron microscope

Method of using a direct electron detector for a TEM

KONINKL PHILIPS ELECTRONICS NV

Optical analysis system using multivariate optical elements

LUEMILEDS USA

Method and apparatus for sensing the color point of an RGB LED white luminary using photodiodes

KONINK PHILIIPS ELECTRONICS N

Optical analysis system

BAKKER LEVINUS PIETER

Radiation system with contamination barrier

WAGNER RAYMOND

Hybrid phase plate

JONKERS JEROEN

Method and device for removing particles generated by means of a radiation source during generation of short-wave radiation

UZUNBAJAKAVA NATALLIA

Spectroscopic method of determining the amount of an analyte in a mixture of analytes

FEI CO

Backscatter reduction in thin electron detectors

WASSINK ARNOUD CORNELIS

Illumination system and filter system

VAN HOFTEN GERRIT CORNELIS

Backscatter reduction in thin electron detectors