P

Inventor

ASCHKE LUTZ

DE6 patents
⚠️ This page may combine multiple inventors who share the name “ASCHKE LUTZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHOTT AG

3 patents
US7129010B2Oct 31, 2006

Substrates for in particular microlithography

SCHOTT AG13 citations82
US7279252B2Oct 9, 2007

Substrate for the micro-lithography and process of manufacturing thereof

SCHOTT AG9 citations65
US7517617B2Apr 14, 2009

Mask blank for use in EUV lithography and method for its production

SCHOTT AG6 citations56

MITRA THOMAS

1 patent
US8416500B2Apr 9, 2013

Device and method for beam forming

MITRA THOMAS11 citations79

ASCHKE LUTZ

1 patent
US8639071B2Jan 28, 2014

Device for forming laser radiation

ASCHKE LUTZ4 citations60

AIXUV GMBH

1 patent
US6856395B2Feb 15, 2005

Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner

AIXUV GMBH4 citations51