Inventor

HIRATSUKA AKIHIKO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HIRATSUKA AKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO TECHNOLOGICAL LABO CO LTD

1 patent

US7849873B2Dec 14, 2010

Heater unit for installation on valve

TOKYO TECHNOLOGICAL LABO CO LTD7 citations60

HITACHI INT ELECTRIC INC

1 patent

US11198935B2Dec 14, 2021

Heating part, substrate processing apparatus, and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations47