Inventor
LEE FU-SU
TW3 patents
Patents
3 patentsUS6740196B2May 25, 2004
RTA chamber with in situ reflective index monitor
TAIWAN SEMICONDUCTOR MFG12 citations70
US7089677B2Aug 15, 2006
Method for calibrating alignment mark positions on substrates
TAIWAN SEMICONDUCTOR MFG7 citations65
US6777251B2Aug 17, 2004
Metrology for monitoring a rapid thermal annealing process
TAIWAN SEMICONDUCTOR MFG2 citations60