Inventor
CHANG JUIN-JIE
TW5 patents
Patents
5 patentsUS6130151AOct 10, 2000
Method of manufacturing air gap in multilevel interconnection
TAIWAN SEMICONDUCTOR MFG83 citations95
US6069063AMay 30, 2000
Method to form polysilicon resistors shielded from hydrogen intrusion
TAIWAN SEMICONDUCTOR MFG25 citations92
US6472719B1Oct 29, 2002
Method of manufacturing air gap in multilevel interconnection
TAIWAN SEMICONDUCTOR MFG14 citations83
US6740196B2May 25, 2004
RTA chamber with in situ reflective index monitor
TAIWAN SEMICONDUCTOR MFG12 citations70
US6589356B1Jul 8, 2003
Method for cleaning a silicon-based substrate without NH4OH vapor damage
TAIWAN SEMICONDUCTOR MFG5 citations60