Inventor
LU CHING-SHAN
TW15 patents
⚠️ This page may combine multiple inventors who share the name “LU CHING-SHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
6 patentsUS6740196B2May 25, 2004
RTA chamber with in situ reflective index monitor
TAIWAN SEMICONDUCTOR MFG12 citations70
US7089677B2Aug 15, 2006
Method for calibrating alignment mark positions on substrates
TAIWAN SEMICONDUCTOR MFG7 citations65
US6642128B1Nov 4, 2003
Method for high temperature oxidations to prevent oxide edge peeling
TAIWAN SEMICONDUCTOR MFG4 citations62
US6954715B2Oct 11, 2005
System and method for equipment malfunction detection and diagnosis
TAIWAN SEMICONDUCTOR MFG5 citations61
US6777251B2Aug 17, 2004
Metrology for monitoring a rapid thermal annealing process
TAIWAN SEMICONDUCTOR MFG2 citations60
US6927076B2Aug 9, 2005
Method for recovering a plasma process
TAIWAN SEMICONDUCTOR MFG3 citations54
ANPEC ELECTRONICS CORP
3 patentsUS11258381B1Feb 22, 2022
Driving circuit for single phase motor and driving method for the same
ANPEC ELECTRONICS CORP0 citations51
US9774283B2Sep 26, 2017
Motor driving circuit and method
ANPEC ELECTRONICS CORP1 citations51
US11088639B2Aug 10, 2021
Motor driving device and method thereof
ANPEC ELECTRONICS CORP0 citations50