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Inventor
BOTHELHO HERALDO L
US
2 patents
Patents
2 patents
US8211626B2
Jul 3, 2012
Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizes
AHN SANG H
1 citations
42
US8088563B2
Jan 3, 2012
Reduction in photoresist footing undercut during development of feature sizes of 120NM or less
AHN SANG H
0 citations
42