Inventor
STANKE FRED E
US40 patents
⚠️ This page may combine multiple inventors who share the name “STANKE FRED E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
12 patentsUS6819426B2Nov 16, 2004
Overlay alignment metrology using diffraction gratings
THERMA WAVE INC373 citations99
US6753961B1Jun 22, 2004
Spectroscopic ellipsometer without rotating components
THERMA WAVE INC154 citations99
US6768967B2Jul 27, 2004
Database interpolation method for optical measurement of diffractive microstructures
THERMA WAVE INC110 citations98
US6806105B2Oct 19, 2004
Method of measuring meso-scale structures on wafers
THERMA WAVE INC49 citations96
US6778273B2Aug 17, 2004
Polarimetric scatterometer for critical dimension measurements of periodic structures
THERMA WAVE INC51 citations96
US6623991B2Sep 23, 2003
Method of measuring meso-scale structures on wafers
THERMA WAVE INC57 citations96
US6563586B1May 13, 2003
Wafer metrology apparatus and method
THERMA WAVE INC44 citations95
US6909507B2Jun 21, 2005
Polarimetric scatterometry methods for critical dimension measurements of periodic structures
THERMA WAVE INC12 citations93
US6850333B1Feb 1, 2005
Optimized aperture shape for optical CD/profile metrology
THERMA WAVE INC16 citations84
US6919958B2Jul 19, 2005
Wafer metrology apparatus and method
THERMA WAVE INC7 citations70
US6870617B2Mar 22, 2005
Accurate small-spot spectrometry systems and methods
THERMA WAVE INC2 citations62
US6738136B2May 18, 2004
Accurate small-spot spectrometry instrument
THERMA WAVE INC2 citations62
TOKYO ELECTRON LTD
11 patentsUS7042569B2May 9, 2006
Overlay alignment metrology using diffraction gratings
TOKYO ELECTRON LTD70 citations98
US7289219B2Oct 30, 2007
Polarimetric scatterometry methods for critical dimension measurements of periodic structures
TOKYO ELECTRON LTD10 citations84
US7099081B2Aug 29, 2006
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
TOKYO ELECTRON LTD10 citations74
US7069182B2Jun 27, 2006
Database interpolation method for optical measurement of diffractive microstructures
TOKYO ELECTRON LTD6 citations74
US7042580B1May 9, 2006
Apparatus for imaging metrology
TOKYO ELECTRON LTD10 citations73
US7471392B2Dec 30, 2008
Polarimetric scatterometry methods for critical dimension measurements of periodic structures
TOKYO ELECTRON LTD2 citations63
US7158229B2Jan 2, 2007
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
TOKYO ELECTRON LTD3 citations63
US7049633B2May 23, 2006
Method of measuring meso-scale structures on wafers
TOKYO ELECTRON LTD2 citations63
US7177019B2Feb 13, 2007
Apparatus for imaging metrology
TOKYO ELECTRON LTD6 citations62
US7248362B2Jul 24, 2007
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
TOKYO ELECTRON LTD0 citations52
US6950780B2Sep 27, 2005
Database interpolation method for optical measurement of diffractive microstructures
TOKYO ELECTRON LTD0 citations52
SENSYS INSTR CORP
9 patentsUS6690473B1Feb 10, 2004
Integrated surface metrology
SENSYS INSTR CORP110 citations96
US5996415ADec 7, 1999
Apparatus and method for characterizing semiconductor wafers during processing
SENSYS INSTR CORP79 citations95
US6182510B1Feb 6, 2001
Apparatus and method for characterizing semiconductor wafers during processing
SENSYS INSTR CORP57 citations94
US6112595ASep 5, 2000
Apparatus and method for characterizing semiconductor wafers during processing
SENSYS INSTR CORP32 citations92
US6019000AFeb 1, 2000
In-situ measurement of deposition on reactor chamber members
SENSYS INSTR CORP30 citations92
US6829054B2Dec 7, 2004
Integrated surface metrology
SENSYS INSTR CORP37 citations91
US6667805B2Dec 23, 2003
Small-spot spectrometry instrument with reduced polarization
SENSYS INSTR CORP15 citations84
US6510395B2Jan 21, 2003
Method of detecting residue on a polished wafer
SENSYS INSTR CORP11 citations74
US6572456B2Jun 3, 2003
Bathless wafer measurement apparatus and method
SENSYS INSTR CORP0 citations45
SCHLUMBERGER TECHNOLOGY CORP
6 patentsUS6018496AJan 25, 2000
Method and apparatus for hydraulic isolation determination
SCHLUMBERGER TECHNOLOGY CORP68 citations96
US5859811AJan 12, 1999
Method of analyzing waveforms
SCHLUMBERGER TECHNOLOGY CORP55 citations96
US5717169AFeb 10, 1998
Method and apparatus for inspecting well bore casing
SCHLUMBERGER TECHNOLOGY CORP171 citations96
US4928269AMay 22, 1990
Determining impedance of material behind a casing in a borehole
SCHLUMBERGER TECHNOLOGY CORP80 citations93
US5274604ADec 28, 1993
Method for spatially filtering signals representing formation and channel echoes in a borehole environment
SCHLUMBERGER TECHNOLOGY CORP45 citations92
US6188643B1Feb 13, 2001
Method and apparatus for inspecting well bore casing
SCHLUMBERGER TECHNOLOGY CORP34 citations90