Inventor
KOLESNYCHENKO ALEKSEY YURIEVIC
NL12 patents
Patents
12 patentsUS7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7050146B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV165 citations99
US7119874B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV143 citations98
US7411653B2Aug 12, 2008
Lithographic apparatus
ASML NETHERLANDS BV49 citations96
US7354698B2Apr 8, 2008
Imprint lithography
ASML NETHERLANDS BV26 citations89
US7677877B2Mar 16, 2010
Imprint lithography
ASML NETHERLANDS BV7 citations74
US7193229B2Mar 20, 2007
Lithographic apparatus, illumination system and method for mitigating debris particles
ASML NETHERLANDS BV8 citations74
US7012673B2Mar 14, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations73
US7523701B2Apr 28, 2009
Imprint lithography method and apparatus
ASML NETHERLANDS BV3 citations63
US7377764B2May 27, 2008
Imprint lithography
ASML NETHERLANDS BV4 citations63
US7075617B2Jul 11, 2006
Device manufacturing method and a lithographic apparatus
ASML NETHERLANDS BV0 citations50