Inventor
JOHNSTON BENJAMIN M
US15 patents
Patents
15 patentsUS9927723B2Mar 27, 2018
Apparatus and methods for on-the-fly digital exposure image data modification
APPLIED MATERIALS INC2 citations73
US7746088B2Jun 29, 2010
In-line electron beam test system
APPLIED MATERIALS INC6 citations73
US7535238B2May 19, 2009
In-line electron beam test system
APPLIED MATERIALS INC5 citations73
US10031427B2Jul 24, 2018
Methods and apparatus for vibration damping stage
APPLIED MATERIALS INC3 citations71
US9315900B2Apr 19, 2016
Isolation of microwave sources through bellows
APPLIED MATERIALS INC2 citations62
US7973546B2Jul 5, 2011
In-line electron beam test system
APPLIED MATERIALS INC1 citations62
US7786742B2Aug 31, 2010
Prober for electronic device testing on large area substrates
APPLIED MATERIALS INC2 citations59
US12061422B2Aug 13, 2024
Method for fast loading substrates in a flat panel tool
APPLIED MATERIALS INC0 citations56
US11009801B2May 18, 2021
Dynamic cooling control for thermal stabilization for lithography system
APPLIED MATERIALS INC0 citations56
US10901328B2Jan 26, 2021
Method for fast loading substrates in a flat panel tool
APPLIED MATERIALS INC0 citations56
US10788762B2Sep 29, 2020
Dynamic cooling control for thermal stabilization for lithography system
APPLIED MATERIALS INC1 citations56
US10379450B2Aug 13, 2019
Apparatus and methods for on-the-fly digital exposure image data modification
APPLIED MATERIALS INC0 citations52
US10036966B2Jul 31, 2018
Environmental control of systems for photolithography process
APPLIED MATERIALS INC1 citations52
US7602199B2Oct 13, 2009
Mini-prober for TFT-LCD testing
APPLIED MATERIALS INC1 citations51
US9820372B2Nov 14, 2017
Segmented antenna assembly
APPLIED MATERIALS INC0 citations50