Inventor
WANG YU-I
TW3 patents
Patents
3 patentsUS6656796B2Dec 2, 2003
Multiple etch method for fabricating split gate field effect transistor (FET) device
TAIWAN SEMICONDUCTOR MFG30 citations89
US6333271B1Dec 25, 2001
Multi-step plasma etch method for plasma etch processing a microelectronic layer
TAIWAN SEMICONDUCTOR MFG14 citations72
US7202172B2Apr 10, 2007
Microelectronic device having disposable spacer
TAIWAN SEMICONDUCTOR MFG2 citations59