Inventor

MAKINO FUMINORI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MAKINO FUMINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO HEAVY INDUSTRIES

2 patents

US7959141B2Jun 14, 2011

Stage apparatus

SUMITOMO HEAVY INDUSTRIES66 citations92

US6789457B2Sep 14, 2004

Gas pressure actuator capable of stably driving and controlling its slider, and method for controlling the gas pressure actuator

SUMITOMO HEAVY INDUSTRIES1 citations46

MAKINO FUMINORI

1 patent

US8517363B2Aug 27, 2013

XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus

MAKINO FUMINORI10 citations75